190
TSMC's 2nm process will reportedly get another price hike — $30,000 per wafer for latest cutting-edge tech
(www.tomshardware.com)
This is a most excellent place for technology news and articles.
Late 90s was 350nm down to 180nm (Known as 0.35um and 0.18um respectively). Things were still pretty honest around then.
2010s is probably where most of the shenanigans started.